Inventor · disambiguated record
Arthur Ang
Also filed as: ANG ARTHUR · ANG ARTHUR KHOON SIAH
6 granted patents·168 citations·filing 2000–2002
85Inventor score
Top patents by PatentIndex Score
6 records- 0191US6232217B1Post treatment of via opening by N-containing plasma or H-containing plasma for elimination of fluorine species in the FSG near the surfaces of the via openingCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted May 15, 2001·81 cites·34 claims
- 0285US6537411B1Method for low temperature lamination of metals to polyimidesUNIV SINGAPORE·Filed 2000·Granted Mar 25, 2003·37 cites·14 claims
- 0378US6451687B1Intermetal dielectric layer for integrated circuitsCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Sep 17, 2002·19 cites·10 claims
- 0471US6653227B1Method of cobalt silicidation using an oxide-Titanium interlayerCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Nov 25, 2003·21 cites·21 claims
- 0558US6383922B1Thermal stability improvement of CoSi2 film by stuffing in titaniumCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted May 7, 2002·8 cites·21 claims
- 0649US6528886B2Intermetal dielectric layer for integrated circuitsCHARTERED SEMICONDUCTOR MFG·Filed 2002·Granted Mar 4, 2003·2 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →