Inventor · disambiguated record
Katsuhito Hirose
Also filed as: HIROSE KATSUHITO
8 granted patents·2 pending applications·18 citations·filing 2009–2022
80Inventor score
Top patents by PatentIndex Score
10 records- 0191US11081322B2Film forming apparatus, cleaning method for film forming apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Aug 3, 2021·5 cites·8 claims
- 0284US12087562B2Substrate processing apparatus, substrate processing system, and abnormality detection methodTOKYO ELECTRON LTD·Filed 2022·Granted Sep 10, 2024·2 cites·8 claims
- 0382US9725804B2Processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Aug 8, 2017·4 cites·5 claims
- 0480US8834631B2Processing apparatus and valve operation checking methodTOKYO ELECTRON LTD·Filed 2013·Granted Sep 16, 2014·5 cites·13 claims
- 0576US11873560B2Abnormality detection system and control boardTOKYO ELECTRON LTD·Filed 2017·Granted Jan 16, 2024·2 cites·12 claims
- 0656US9708711B2Processing apparatus and process status checking methodTOKYO ELECTRON LTD·Filed 2013·Granted Jul 18, 2017·0 cites·4 claims
- 0746US2010080444A1Processing apparatus, processing method, method of recognizing target object and storage mediumTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0844US11276592B2Processing apparatus and processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Mar 15, 2022·0 cites·9 claims
- 0944US10815567B2Deposition device and deposition methodTOKYO ELECTRON LTD·Filed 2015·Granted Oct 27, 2020·0 cites·6 claims
- 1031US2013180448A1Substrate transfer device and substrate processing systemSAKAUE HIROMITSU·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →