Inventor · disambiguated record
Hiraku Murakami
Also filed as: MURAKAMI HIRAKU
3 granted patents·1 pending application·3 citations·filing 2015–2019
54Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0172US10264630B2Plasma processing apparatus and method for processing objectTOKYO ELECTRON LTD·Filed 2015·Granted Apr 16, 2019·2 cites·8 claims
- 0264US9818582B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2016·Granted Nov 14, 2017·1 cites·7 claims
- 0339US10553409B2Method of cleaning plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Feb 4, 2020·0 cites·8 claims
- 0437US2019318914A1Processing apparatus and method for controlling processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →