Inventor · disambiguated record
Tatsushi Owada
Also filed as: OWADA TATSUSHI
3 granted patents·1 pending application·14 citations·filing 2002–2022
57Inventor score
Files withUSHIO ELECTRIC INC4
Top patents by PatentIndex Score
4 records- 0165US6897130B2Method for thermal processing semiconductor wafer with a flash discharge lamp after preheating to a predetermined temperatureUSHIO ELECTRIC INC·Filed 2002·Granted May 24, 2005·14 cites·2 claims
- 0259US2024207115A1Inactivation methodUSHIO ELECTRIC INC·Filed 2022·Application pending·0 cites
- 0349US9070526B2Light source device, light irradiating apparatus equipped with light source device, and method of patterning self-assembled monolayer using light irradiating apparatusUSHIO ELECTRIC INC·Filed 2014·Granted Jun 30, 2015·0 cites·8 claims
- 0439US10061197B2Light irradiation device and method for patterning self assembled monolayerUSHIO ELECTRIC INC·Filed 2015·Granted Aug 28, 2018·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →