Inventor · disambiguated record
Peter J. Lembesis
Also filed as: LEMBESIS PETER · LEMBESIS PETER J
5 granted patents·4 pending applications·6 citations·filing 2012–2022
69Inventor score
Top patents by PatentIndex Score
9 records- 0195US11348767B2Plasma processing apparatus having a focus ring adjustment assemblyMATTSON TECH INC·Filed 2020·Granted May 31, 2022·4 cites·15 claims
- 0289US11508560B2Focus ring adjustment assembly of a system for processing workpieces under vacuumMATTSON TECH INC·Filed 2020·Granted Nov 22, 2022·2 cites·13 claims
- 0375US2023091035A1Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing ApparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
- 0468US11515127B2End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuumMATTSON TECH INC·Filed 2020·Granted Nov 29, 2022·0 cites·12 claims
- 0552US2023142778A1Storage Cassette for Replaceable Parts for Plasma Processing ApparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2022·Application pending·0 cites
- 0646US11195718B2Spacer open process by dual plasmaMATTSON TECH INC·Filed 2020·Granted Dec 7, 2021·0 cites·12 claims
- 0744US2020243305A1Post Plasma Gas Injection In A Separation GridMATTSON TECH INC·Filed 2020·Application pending·0 cites
- 0839US2020258718A1Gas Supply With Angled Injectors In Plasma Processing ApparatusMATTSON TECH INC·Filed 2019·Application pending·0 cites
- 0938US9245730B2Apparatus and methods for generating electromagnetic radiationKAMDAR AMAR B·Filed 2012·Granted Jan 26, 2016·0 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →