Inventor · disambiguated record
Matthias Illing
Also filed as: ILLING MATTHIAS
12 granted patents·4 pending applications·116 citations·filing 2000–2012
88Inventor score
Top patents by PatentIndex Score
16 records- 0192US7354786B2Sensor element with trenched cavityBOSCH GMBH ROBERT·Filed 2005·Granted Apr 8, 2008·27 cites·11 claims
- 0286US6360605B1Micromechanical deviceBOSCH GMBH ROBERT·Filed 2000·Granted Mar 26, 2002·73 cites·9 claims
- 0381US8900906B2Atomic layer deposition strengthening members and method of manufactureYAMA GARY·Filed 2012·Granted Dec 2, 2014·3 cites·19 claims
- 0460US7863072B2Micromechanical diaphragm sensor having a double diaphragmBOSCH GMBH ROBERT·Filed 2005·Granted Jan 4, 2011·1 cites·16 claims
- 0559US8317882B2Method of manufacturing a planar electrode with large surface areaCHEN PO-JUI·Filed 2009·Granted Nov 27, 2012·0 cites·15 claims
- 0656US8405210B2Method for producing a plurality of chips and a chip produced accordinglyKRAMER TORSTEN·Filed 2008·Granted Mar 26, 2013·1 cites·10 claims
- 0753US6989609B2Method and apparatus for supplying energy to sensorsBOSCH GMBH ROBERT·Filed 2004·Granted Jan 24, 2006·6 cites·12 claims
- 0852US8148234B2Method for manufacturing a semiconductor structure, and a corresponding Semiconductor StructureLAMMEL GERHARD·Filed 2007·Granted Apr 3, 2012·0 cites·12 claims
- 0951US8389327B2Method for manufacturing chipsKRAMER TORSTEN·Filed 2008·Granted Mar 5, 2013·0 cites·21 claims
- 1050US8492850B2Method for producing a silicon substrate having modified surface properties and a silicon substrate of said typeLAMMEL GERHARD·Filed 2007·Granted Jul 23, 2013·0 cites·5 claims
- 1147US2012132925A1Method for manufacturing a semiconductor structure, and a corresponding semiconductor structureLAMMEL GERHARD·Filed 2012·Application pending·0 cites
- 1246US6739193B2Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the sameBOSCH GMBH ROBERT·Filed 2000·Granted May 25, 2004·5 cites·6 claims
- 1343US2011169107A1Method for manufacturing a component, method for manufacturing a component system, component, and component systemKRAMER TORSTEN·Filed 2009·Application pending·0 cites
- 1441US7572661B2Method for manufacturing a micromechanical sensor elementBOSCH GMBH ROBERT·Filed 2005·Granted Aug 11, 2009·0 cites·21 claims
- 1535US2006229009A1Method for controlling an air circulation part and/or an air supply part in a passenger cellILLING MATTHIAS·Filed 2003·Application pending·0 cites
- 1635US2009222231A1Method and device for correcting a signal of a sensorBERGER JOACHIM·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →