Inventor · disambiguated record
Joel M. Sharrow
Also filed as: SHARROW JOEL M
8 granted patents·114 citations·filing 1998–2004
86Inventor score
Files withIBM8
Top patents by PatentIndex Score
8 records- 0191US6776171B2Cleaning of semiconductor wafers by contaminate encapsulationIBM·Filed 2001·Granted Aug 17, 2004·43 cites·7 claims
- 0270US6670283B2Backside protection filmsIBM·Filed 2001·Granted Dec 30, 2003·15 cites·20 claims
- 0363US6992014B2Method and apparatus for etch rate uniformity controlIBM·Filed 2002·Granted Jan 31, 2006·10 cites·14 claims
- 0458US6340601B1Method for reworking copper metallurgy in semiconductor devicesIBM·Filed 1999·Granted Jan 22, 2002·26 cites·16 claims
- 0547US6356653B2Method and apparatus for combined particle location and removalIBM·Filed 1998·Granted Mar 12, 2002·16 cites·34 claims
- 0646US6884722B2Method of fabricating a narrow polysilicon lineIBM·Filed 2001·Granted Apr 26, 2005·1 cites·19 claims
- 0745US7531059B2Cleaning of semiconductor wafers by contaminate encapsulationIBM·Filed 2004·Granted May 12, 2009·0 cites·5 claims
- 0845US6939408B1Method for surface preparation of workpieces utilizing fluid separation techniquesIBM·Filed 2000·Granted Sep 6, 2005·3 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →