Inventor · disambiguated record
Cecil J. Davis
Also filed as: DAVIS CECIL · DAVIS CECIL J
90 granted patents·8,446 citations·filing 1984–2000
99Inventor score
Top patents by PatentIndex Score
90 records- 0199US5453124AProgrammable multizone gas injector for single-wafer semiconductor processing equipmentTEXAS INSTRUMENTS INC·Filed 1994·Granted Sep 26, 1995·908 cites·4 claims
- 0299US4820377AMethod for cleanup processing chamber and vacuum process moduleTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 11, 1989·334 cites·52 claims
- 0398US5268989AMulti zone illuminator with embeded process control sensors and light interference elimination circuitTEXAS INSTRUMENTS INC·Filed 1992·Granted Dec 7, 1993·399 cites·20 claims
- 0498US4949671AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 21, 1990·372 cites·9 claims
- 0598US4916091APlasma and plasma UV deposition of SiO2TEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 10, 1990·494 cites·8 claims
- 0698US4904621ARemote plasma generation process using a two-stage showerheadTEXAS INSTRUMENTS INC·Filed 1987·Granted Feb 27, 1990·287 cites·6 claims
- 0798US4837113AMethod for depositing compound from group II-VITEXAS INSTRUMENTS INC·Filed 1988·Granted Jun 6, 1989·475 cites·16 claims
- 0897US5464499AMulti-electrode plasma processing apparatusTEXAS INSTRUMENTS INC·Filed 1993·Granted Nov 7, 1995·297 cites·11 claims
- 0997US4886570AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Dec 12, 1989·160 cites·40 claims
- 1096US4988533AMethod for deposition of silicon oxide on a waferTEXAS INSTRUMENTS INC·Filed 1988·Granted Jan 29, 1991·116 cites·10 claims
- 1196US4828649AMethod for etching an aluminum film doped with siliconTEXAS INSTRUMENTS INC·Filed 1988·Granted May 9, 1989·176 cites·15 claims
- 1296US4816098AApparatus for transferring workpiecesTEXAS INSTRUMENTS INC·Filed 1987·Granted Mar 28, 1989·185 cites·4 claims
- 1395US5138973AWafer processing apparatus having independently controllable energy sourcesTEXAS INSTRUMENTS INC·Filed 1988·Granted Aug 18, 1992·108 cites·14 claims
- 1495US4911103AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Mar 27, 1990·167 cites·12 claims
- 1595US4867841AMethod for etch of polysilicon filmTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 19, 1989·141 cites·15 claims
- 1694US5286297AMulti-electrode plasma processing apparatusTEXAS INSTRUMENTS INC·Filed 1992·Granted Feb 15, 1994·96 cites·20 claims
- 1794US5082542ADistributed-array magnetron-plasma processing module and methodTEXAS INSTRUMENTS INC·Filed 1990·Granted Jan 21, 1992·84 cites·60 claims
- 1893US5580385AStructure and method for incorporating an inductively coupled plasma source in a plasma processing chamberTEXAS INSTRUMENTS INC·Filed 1994·Granted Dec 3, 1996·149 cites·28 claims
- 1993US5262610ALow particulate reliability enhanced remote microwave plasma discharge deviceUS ARMY·Filed 1991·Granted Nov 16, 1993·86 cites·3 claims
- 2093US4818326AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 4, 1989·124 cites·9 claims
- 2193US4687542AVacuum processing systemTEXAS INSTRUMENTS INC·Filed 1985·Granted Aug 18, 1987·138 cites·42 claims
- 2292US6508885B1Edge sealing structure for substrate in low-pressure processing environmentCVC PRODUCTS INC·Filed 2000·Granted Jan 21, 2003·41 cites·21 claims
- 2392US5446825AHigh performance multi-zone illuminator module for semiconductor wafer processingTEXAS INSTRUMENTS INC·Filed 1993·Granted Aug 29, 1995·158 cites·19 claims
- 2492US5217559AApparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processingTEXAS INSTRUMENTS INC·Filed 1990·Granted Jun 8, 1993·143 cites·16 claims
- 2592US5044871AIntegrated circuit processing systemTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 3, 1991·131 cites·9 claims
- 2692US4878994AMethod for etching titanium nitride local interconnectsTEXAS INSTRUMENTS INC·Filed 1988·Granted Nov 7, 1989·124 cites·53 claims
- 2791US5248636AProcessing method using both a remotely generated plasma and an in-situ plasma with UV irradiationTEXAS INSTRUMENTS INC·Filed 1992·Granted Sep 28, 1993·86 cites·1 claims
- 2891US4863561AMethod and apparatus for cleaning integrated circuit wafersTEXAS INSTRUMENTS INC·Filed 1988·Granted Sep 5, 1989·98 cites·14 claims
- 2991US4838990AMethod for plasma etching tungstenTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 13, 1989·102 cites·11 claims
- 3091US4836905AProcessing apparatusTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 6, 1989·117 cites·12 claims
- 3190US6905578B1Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structureCVC PRODUCTS INC·Filed 1998·Granted Jun 14, 2005·102 cites·95 claims
- 3290US6705394B1Rapid cycle chuck for low-pressure processingCVC PRODUCTS INC·Filed 2000·Granted Mar 16, 2004·57 cites·63 claims
- 3388US4906328AMethod for wafer treatingTEXAS INSTRUMENTS INC·Filed 1988·Granted Mar 6, 1990·42 cites·24 claims
- 3488US4842686AWafer processing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1987·Granted Jun 27, 1989·54 cites·63 claims
- 3588US4818327AWafer processing apparatusTEXAS INSTRUMENTS INC·Filed 1987·Granted Apr 4, 1989·77 cites·21 claims
- 3687US4877757AMethod of sequential cleaning and passivating a GaAs substrate using remote oxygen plasmaTEXAS INSTRUMENTS INC·Filed 1988·Granted Oct 31, 1989·83 cites·10 claims
- 3787US4822450AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted Apr 18, 1989·56 cites·30 claims
- 3886US4659413AAutomated single slice cassette load lock plasma reactorTEXAS INSTRUMENTS INC·Filed 1984·Granted Apr 21, 1987·31 cites·35 claims
- 3985US4891087AIsolation substrate ring for plasma reactorTEXAS INSTRUMENTS INC·Filed 1987·Granted Jan 2, 1990·39 cites·11 claims
- 4083US5876573AHigh magnetic flux cathode apparatus and method for high productivity physical-vapor depositionCVC INC·Filed 1996·Granted Mar 2, 1999·61 cites·34 claims
- 4183US4966519AIntegrated circuit processing systemTEXAS INSTRUMENTS INC·Filed 1987·Granted Oct 30, 1990·67 cites·46 claims
- 4282US6221217B1Physical vapor deposition system having reduced thickness backing plateCVC INC·Filed 1998·Granted Apr 24, 2001·55 cites·20 claims
- 4382US5345534ASemiconductor wafer heater with infrared lamp module with light blocking meansTEXAS INSTRUMENTS INC·Filed 1993·Granted Sep 6, 1994·80 cites·10 claims
- 4482US4891488AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1987·Granted Jan 2, 1990·57 cites·5 claims
- 4581US4832777AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1988·Granted May 23, 1989·53 cites·16 claims
- 4681US4657620AAutomated single slice powered load lock plasma reactorTEXAS INSTRUMENTS INC·Filed 1984·Granted Apr 14, 1987·24 cites·34 claims
- 4780US6073576ASubstrate edge seal and clamp for low-pressure processing equipmentCVC PRODUCTS INC·Filed 1997·Granted Jun 13, 2000·51 cites·70 claims
- 4880US6039848AUltra-high vacuum apparatus and method for high productivity physical vapor deposition.CVC PRODUCTS INC·Filed 1997·Granted Mar 21, 2000·52 cites·33 claims
- 4980US4910043AProcessing apparatus and methodTEXAS INSTRUMENTS INC·Filed 1987·Granted Mar 20, 1990·66 cites·14 claims
- 5080US4654106AAutomated plasma reactorTEXAS INSTRUMENTS INC·Filed 1984·Granted Mar 31, 1987·20 cites·25 claims
Showing the top 50 of 90 patent records by PatentIndex Score.
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