Inventor · disambiguated record
Beth Ward
Also filed as: WARD BETH A
9 granted patents·64 citations·filing 2001–2007
87Inventor score
Top patents by PatentIndex Score
9 records- 0179US6893979B2Method for improved plasma nitridation of ultra thin gate dielectricsIBM·Filed 2001·Granted May 17, 2005·21 cites·7 claims
- 0271US7291568B2Method for fabricating a nitrided silicon-oxide gate dielectricIBM·Filed 2003·Granted Nov 6, 2007·13 cites·19 claims
- 0364US6670263B2Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain sizeIBM·Filed 2001·Granted Dec 30, 2003·9 cites·5 claims
- 0463US6893948B2Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain sizeIBM·Filed 2003·Granted May 17, 2005·8 cites·17 claims
- 0562US6706644B2Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitorsIBM·Filed 2002·Granted Mar 16, 2004·7 cites·3 claims
- 0660US7109559B2Nitrided ultra thin gate dielectricsIBM·Filed 2004·Granted Sep 19, 2006·6 cites·3 claims
- 0749US8709887B2Method for fabricating a nitrided silicon-oxide gate dielectricBURNHAM JAY S·Filed 2007·Granted Apr 29, 2014·0 cites·18 claims
- 0843US6909157B2Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitorsIBM·Filed 2003·Granted Jun 21, 2005·0 cites·6 claims
- 0940US7714366B2CMOS transistor with a polysilicon gate electrode having varying grain sizeIBM·Filed 2004·Granted May 11, 2010·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →