Inventor · disambiguated record
Mitsuhiro Tanoue
Also filed as: TANOUE MITSUHIRO
8 granted patents·263 citations·filing 1999–2007
90Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0192US7661894B2Coating and developing apparatus, and coating and developing methodTOKYO ELECTRON LTD·Filed 2006·Granted Feb 16, 2010·21 cites·9 claims
- 0292US6474986B2Hot plate cooling method and heat processing apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Nov 5, 2002·71 cites·33 claims
- 0391US7836845B2Substrate carrying and processing apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Nov 23, 2010·21 cites·19 claims
- 0488US6534750B1Heat treatment unit and heat treatment methodTOKYO ELECTRON LTD·Filed 2000·Granted Mar 18, 2003·39 cites·8 claims
- 0582US6450805B1Hot plate cooling method and heat processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Sep 17, 2002·28 cites·19 claims
- 0678US6815647B2Heat treatment unit and heat treatment methodTOKYO ELECTRON LTD·Filed 2003·Granted Nov 9, 2004·18 cites·8 claims
- 0774US6551448B2Heat processing apparatus of substrateTOKYO ELECTRON LTD·Filed 2001·Granted Apr 22, 2003·21 cites·20 claims
- 0873US6185370B1Heating apparatus for heating an object to be processedTOKYO ELECTRON LTD·Filed 1999·Granted Feb 6, 2001·44 cites·32 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →