Inventor · disambiguated record
Ikuo Takada
Also filed as: TAKADA IKUO
3 granted patents·47 citations·filing 1991–1996
71Inventor score
Files withHITACHI LTD3
Top patents by PatentIndex Score
3 records- 0163US5757409AExposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatusHITACHI LTD·Filed 1996·Granted May 26, 1998·25 cites·43 claims
- 0253US5557314AExposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatusHITACHI LTD·Filed 1993·Granted Sep 17, 1996·20 cites·17 claims
- 0331US5206517AElectron beam lithographic methodHITACHI LTD·Filed 1991·Granted Apr 27, 1993·2 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →