Inventor · disambiguated record
Yukinobu Shibata
Also filed as: SHIBATA YUKINOBU
7 granted patents·107 citations·filing 1991–1996
86Inventor score
Files withHITACHI LTD7
Top patents by PatentIndex Score
7 records- 0171US5250812AElectron beam lithography using an aperture having an array of repeated unit patternsHITACHI LTD·Filed 1992·Granted Oct 5, 1993·25 cites·19 claims
- 0263US5757409AExposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatusHITACHI LTD·Filed 1996·Granted May 26, 1998·25 cites·43 claims
- 0363US5424550ACharged particle beam exposure apparatusHITACHI LTD·Filed 1994·Granted Jun 13, 1995·14 cites·60 claims
- 0462US5371373AElectron beam lithography method and apparatus separating repetitive and non-repetitive pattern dataHITACHI LTD·Filed 1993·Granted Dec 6, 1994·16 cites·9 claims
- 0553US5557314AExposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatusHITACHI LTD·Filed 1993·Granted Sep 17, 1996·20 cites·17 claims
- 0641US5281827ACharged particle beam exposure apparatusHITACHI LTD·Filed 1991·Granted Jan 25, 1994·5 cites·15 claims
- 0731US5206517AElectron beam lithographic methodHITACHI LTD·Filed 1991·Granted Apr 27, 1993·2 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →