Inventor · disambiguated record
Akira Koguchi
Also filed as: KOGUCHI AKIRA
4 granted patents·181 citations·filing 1998–2000
81Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0186US6612801B1Method and device for arraying substrates and processing apparatus thereofTOKYO ELECTRON LTD·Filed 2000·Granted Sep 2, 2003·50 cites·12 claims
- 0284US6009890ASubstrate transporting and processing systemTOKYO ELECTRON LTD·Filed 1998·Granted Jan 4, 2000·75 cites·26 claims
- 0372US6269552B1Method of drying substrates and drying apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Aug 7, 2001·44 cites·17 claims
- 0464US6821073B1Container handling system for substrate processing apparatus and method of handling containersTOKYO ELECTRON LTD·Filed 2000·Granted Nov 23, 2004·12 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →