Inventor · disambiguated record
Michitaka Amiya
Also filed as: AMIYA MICHITAKA
2 granted patents·3 citations·filing 2010–2015
41Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0171US10276408B2Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating systemTOKYO ELECTRON LTD·Filed 2015·Granted Apr 30, 2019·2 cites·21 claims
- 0249US8820335B2Cleaning apparatus, substrate processing system, cleaning method, program and storage mediumAMIYA MICHITAKA·Filed 2010·Granted Sep 2, 2014·1 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →