Inventor · disambiguated record
Jorg Paufler
Also filed as: PAUFLER JOERG
2 granted patents·32 citations·filing 1996–2001
54Inventor score
Technology areasG03F
Files withFRAUNHOFER GES FORSCHUNG2
Top patents by PatentIndex Score
2 records- 0168US5936713AMethod and device for producing features on a photolithographic layerFRAUNHOFER GES FORSCHUNG·Filed 1996·Granted Aug 10, 1999·32 cites·15 claims
- 0222US6844916B2Method for improving image quality and for increasing writing speed during exposure of light-sensitive layersFRAUNHOFER GES FORSCHUNG·Filed 2001·Granted Jan 18, 2005·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →