Inventor · disambiguated record
Taro Tezuka
Also filed as: TEZUKA TARO
7 granted patents·15 citations·filing 2006–2013
78Inventor score
Top patents by PatentIndex Score
7 records- 0173US7463365B2Measurement method and apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Dec 9, 2008·4 cites·4 claims
- 0271US7428059B2Measurement method and apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Sep 23, 2008·4 cites·4 claims
- 0366US7724376B2Wavefront-aberration measuring method and device, and exposure apparatus including the deviceCANON KK·Filed 2007·Granted May 25, 2010·3 cites·4 claims
- 0460US7518735B2Measurement method and apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Apr 14, 2009·3 cites·2 claims
- 0545US8174670B2Measurement method and exposure apparatusTEZUKA TARO·Filed 2009·Granted May 8, 2012·1 cites·12 claims
- 0638US9113507B2Light source apparatus and method of controlling the sameCANON KK·Filed 2013·Granted Aug 18, 2015·0 cites·9 claims
- 0730US8830480B2Measurement apparatusTEZUKA TARO·Filed 2011·Granted Sep 9, 2014·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →