Inventor · disambiguated record

Thomas Stotts

Also filed as: STOTTS THOMAS

1 granted patent·272 citations·filing 2006–2006

57Inventor score

Technology areasB24B

Files withNOVELLUS SYSTEMS INC1

Top patents by PatentIndex Score

1 record

0195US7115017B1Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarizationNOVELLUS SYSTEMS INC·Filed 2006·Granted Oct 3, 2006·272 cites·21 claims

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