Inventor · disambiguated record
Katsuhiko Mihara
Also filed as: MIHARA KATSUHIKO
9 granted patents·326 citations·filing 1993–2005
90Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0186US5527390ATreatment system including a plurality of treatment apparatusTOKYO ELECTRON KABUSHIKI·Filed 1994·Granted Jun 18, 1996·109 cites·5 claims
- 0283US7547209B2Vertical heat treatment system and automatic teaching method for transfer mechanismTOKYO ELECTRON LTD·Filed 2005·Granted Jun 16, 2009·10 cites·6 claims
- 0380US5788448AProcessing apparatusTOKYO ELECTRON LTD·Filed 1995·Granted Aug 4, 1998·77 cites·6 claims
- 0473US7416405B2Vertical type of thermal processing apparatus and method of using the sameTOKYO ELECTRON LTD·Filed 2005·Granted Aug 26, 2008·5 cites·2 claims
- 0573US5378145ATreatment system and treatment apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Jan 3, 1995·47 cites·8 claims
- 0669US5853486ATreatment system and treatment apparatus with multi-stage carrier storage chambersTOKYO ELECTRON LTD·Filed 1996·Granted Dec 29, 1998·33 cites·8 claims
- 0767US7677858B2Vertical heat treatment system and method of transferring process objectsTOKYO ELECTRON LTD·Filed 2005·Granted Mar 16, 2010·3 cites·5 claims
- 0866US5829969AVertical heat treating apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Nov 3, 1998·34 cites·10 claims
- 0937US5639234ATreatment system and treatment apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Jun 17, 1997·8 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →