Inventor · disambiguated record
En-Chan Chen
Also filed as: CHEN EN-CHAN
7 granted patents·5 citations·filing 2016–2023
74Inventor score
Technology areasB81B
Top patents by PatentIndex Score
7 records- 0181US9961450B2Piezoresistive microphone and method of fabricating the sameUNITED MICROELECTRONICS CORP·Filed 2016·Granted May 1, 2018·3 cites·19 claims
- 0280US12421103B2Microelectromechanical system deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 23, 2025·0 cites·20 claims
- 0379US11206493B2Sensor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 21, 2021·2 cites·19 claims
- 0473US11577954B2Method for forming semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Feb 14, 2023·0 cites·20 claims
- 0564US10865099B2MEMS device and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 15, 2020·0 cites·20 claims
- 0656US10793426B2Microelectromechanical system structure and method for fabricating the sameUNITED MICROELECTRONICS CORP·Filed 2018·Granted Oct 6, 2020·0 cites·11 claims
- 0754US10087072B2Microelectromechanical system structure including thermal stability layer whose material has higher growth temperature, and method for fabricating the sameUNITED MICROELECTRONICS CORP·Filed 2016·Granted Oct 2, 2018·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →