Inventor · disambiguated record
Susumu Ozasa
Also filed as: OZASA SUSUMU
15 granted patents·308 citations·filing 1978–1994
94Inventor score
Top patents by PatentIndex Score
15 records- 0194US4589773APosition detecting systemNIPPON TELEGRAPH & TELEPHONE·Filed 1981·Granted May 20, 1986·87 cites·10 claims
- 0290US4199688AApparatus for electron beam lithographyHITACHI LTD·Filed 1978·Granted Apr 22, 1980·30 cites·7 claims
- 0383US4658143AIon sourceHITACHI LTD·Filed 1985·Granted Apr 14, 1987·29 cites·33 claims
- 0482US4443703AMethod and apparatus of deflection calibration for a charged particle beam exposure apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 1982·Granted Apr 17, 1984·23 cites·8 claims
- 0576US4801847ACharged particle accelerator using quadrupole electrodesHITACHI LTD·Filed 1984·Granted Jan 31, 1989·26 cites·8 claims
- 0676US4692579AElectron beam lithography apparatusHITACHI LTD·Filed 1985·Granted Sep 8, 1987·21 cites·7 claims
- 0774US5523567AScanning electron microscope and image forming method therewithHITACHI LTD·Filed 1994·Granted Jun 4, 1996·27 cites·8 claims
- 0865US4396901AMethod for correcting deflection distortion in an apparatus for charged particle lithographyHITACHI LTD·Filed 1981·Granted Aug 2, 1983·11 cites·11 claims
- 0961US4642461AField emission type electron microscope using a multi-stage acceleration tubeHITACHI LTD·Filed 1984·Granted Feb 10, 1987·10 cites·6 claims
- 1054US4400622AElectron lens equipmentNIPPON TELEGRAPH & TELEPHONE·Filed 1981·Granted Aug 23, 1983·7 cites·8 claims
- 1146US4437008AElectron beam control systemNIPPON TELEGRAPH & TELEPHONE·Filed 1981·Granted Mar 13, 1984·5 cites·4 claims
- 1245US4577111AApparatus for electron beam lithographyHITACHI LTD·Filed 1983·Granted Mar 18, 1986·12 cites·6 claims
- 1344US4489241AExposure method with electron beam exposure apparatusHITACHI LTD·Filed 1982·Granted Dec 18, 1984·12 cites·13 claims
- 1440US4629930APlasma ion sourceHITACHI LTD·Filed 1983·Granted Dec 16, 1986·4 cites·5 claims
- 1531US4933553AFocusing apparatus of electron microscopeHITACHI KK·Filed 1989·Granted Jun 12, 1990·4 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →