Inventor · disambiguated record
Shuhei Yamabe
Also filed as: YAMABE SHUHEI
6 granted patents·1 pending application·2 citations·filing 2019–2023
66Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0178US11532461B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Dec 20, 2022·2 cites·17 claims
- 0264US2023326724A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0351US11715630B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 1, 2023·0 cites·13 claims
- 0449US11984300B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 14, 2024·0 cites·4 claims
- 0549US11978614B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 7, 2024·0 cites·7 claims
- 0643US11869750B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jan 9, 2024·0 cites·12 claims
- 0743US10847348B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Nov 24, 2020·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →