Inventor · disambiguated record
Walter Steinberg
Also filed as: STEINBERG WALTER · STEINBERG WALTER A
4 granted patents·3 pending applications·12 citations·filing 1975–2008
67Inventor score
Top patents by PatentIndex Score
7 records- 0146US7982950B2Measuring system for structures on a substrate for semiconductor manufactureVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jul 19, 2011·1 cites·8 claims
- 0239US7416819B2Test mask for optical and electron optical systemsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Aug 26, 2008·0 cites·32 claims
- 0338US2009015833A1Device and method for improving the measurement accuracy in an optical cd measurement systemVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 0437US2006274934A1Apparatus and method for improving measuring accuracy in the determination of structural dataVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 0533US4109187AContour control system including cutter radius compensationAUTONUMERICS INC·Filed 1975·Granted Aug 22, 1978·7 cites·23 claims
- 0628US2009066970A1Arrangement and method for improving the measurement accuracy in the nm range for optical systemsMUETEC AUTOMATISIERTE MIKROSKO·Filed 2008·Application pending·0 cites
- 0727US4054822AContouring control system employing ramp staircasing of position pointsAUTONUMERICS INC·Filed 1975·Granted Oct 18, 1977·4 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →