Inventor · disambiguated record
Tetsuya Yukimoto
Also filed as: YUKIMOTO TETSUYA
6 granted patents·8 citations·filing 2003–2014
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0176US8802567B2Plasma processing methodPANASONIC CORP·Filed 2013·Granted Aug 12, 2014·3 cites·3 claims
- 0263US8624340B2Plasma processing apparatus and method thereofOKUMURA TOMOHIRO·Filed 2011·Granted Jan 7, 2014·1 cites·14 claims
- 0351US10147585B2Plasma processing apparatusPANASONIC CORP·Filed 2014·Granted Dec 4, 2018·0 cites·7 claims
- 0448US10229814B2Plasma processing apparatusPANASONIC CORP·Filed 2012·Granted Mar 12, 2019·0 cites·10 claims
- 0545US7666793B2Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor deviceSONY CORP·Filed 2004·Granted Feb 23, 2010·1 cites·17 claims
- 0645US6916747B2Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor deviceCV RES CORP·Filed 2003·Granted Jul 12, 2005·3 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →