Inventor · disambiguated record
Alexander Ludwig Klein
Also filed as: KLEIN ALEXANDER LUDWIG
4 granted patents·8 pending applications·4 citations·filing 2019–2024
59Inventor score
Files withASML NETHERLANDS BV12
Top patents by PatentIndex Score
12 records- 0189US11467486B2Graphene pellicle lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Oct 11, 2022·4 cites·21 claims
- 0279US2024369920A1Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0361US12072620B2Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 27, 2024·0 cites·20 claims
- 0456US2025146948A1Inspection tool and barrier for use thereinASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0553US2025013142A1Pellicles and membranes for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0653US2024411222A1Pellicle membrane for a lithographic apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0751US12339588B2High force low voltage piezoelectric micromirror actuatorASML NETHERLANDS BV·Filed 2021·Granted Jun 24, 2025·0 cites·13 claims
- 0848US2023168577A1Optical element and pellicle membrane for a lithographic apparatusASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0947US12325911B2Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2020·Granted Jun 10, 2025·0 cites·17 claims
- 1047US2023333462A1Pellicle membrane for a lithographic apparatusASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1146US2023050613A1Pellicle membrane for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 1245US2024004184A1High accuracy temperature-compensated piezoresistive position sensing systemASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →