Inventor · disambiguated record
Yukihito Tashiro
Also filed as: TASHIRO YUKIHITO
11 granted patents·3 pending applications·15 citations·filing 1998–2021
82Inventor score
Top patents by PatentIndex Score
14 records- 0180US11891685B2Vacuum processing apparatusULVAC INC·Filed 2020·Granted Feb 6, 2024·1 cites·4 claims
- 0279US10763153B2Holding apparatusULVAC INC·Filed 2017·Granted Sep 1, 2020·4 cites·6 claims
- 0377US9346171B2Substrate transport apparatus, and system and method for manufacturing electronic deviceCANON ANELVA CORPOREATION·Filed 2013·Granted May 24, 2016·6 cites·8 claims
- 0469US10844474B2Cathode unit for sputtering apparatusULVAC INC·Filed 2018·Granted Nov 24, 2020·1 cites·4 claims
- 0567US9355878B2Substrate processing apparatusIZA CORP·Filed 2013·Granted May 31, 2016·3 cites·6 claims
- 0660US11549173B2Sputtering apparatusULVAC INC·Filed 2021·Granted Jan 10, 2023·0 cites·6 claims
- 0751US10934616B2Cathode device and sputtering apparatusULVAC INC·Filed 2019·Granted Mar 2, 2021·0 cites·8 claims
- 0842US9561586B2Articulated robot, and conveying deviceULVAC INC·Filed 2013·Granted Feb 7, 2017·0 cites·9 claims
- 0941US11056323B2Sputtering apparatus and method of forming filmULVAC INC·Filed 2018·Granted Jul 6, 2021·0 cites·2 claims
- 1038US2008171435A1Vacuum Processing Apparatus, Method for Manufacturing Semiconductor Device, and System For Manufacturing Semiconductor DeviceCANON ANELVA CORP·Filed 2006·Application pending·0 cites
- 1130US9245785B2Substrate processing apparatusTASHIRO YUKIHITO·Filed 2012·Granted Jan 26, 2016·0 cites·3 claims
- 1228US8912697B2Vacuum actuator including a stator forming a part of a vacuum partition wallWATANABE KAZUHITO·Filed 2010·Granted Dec 16, 2014·0 cites·12 claims
- 1328US2001052392A1Multichamber substrate processing apparatusFiled 1998·Application pending·0 cites
- 1428US2012014770A1Substrate conveyance apparatus, electronic device manufacturing system, and electronic device manufacturing methodWATANABE KAZUHITO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →