Inventor · disambiguated record
Mitsuru Uda
Also filed as: UDA MITSURU
12 granted patents·1 pending application·212 citations·filing 1995–2008
92Inventor score
Files withIBM13
Top patents by PatentIndex Score
13 records- 0186US7719672B2Macro inspection apparatus and microscopic inspection methodIBM·Filed 2008·Granted May 18, 2010·16 cites·10 claims
- 0286US5739890ALiquid crystal display device and a method of fabricating sameIBM·Filed 1996·Granted Apr 14, 1998·95 cites·6 claims
- 0385US6452671B1Illuminator for macro inspection, macro inspecting apparatus and macro inspecting methodIBM·Filed 2000·Granted Sep 17, 2002·28 cites·20 claims
- 0474US7440118B2Apparatus and method for color filter inspectionIBM·Filed 2006·Granted Oct 21, 2008·5 cites·18 claims
- 0574US6825924B2Dual peak wavelength tube, illuminator for inspection, inspecting apparatus, and method thereofIBM·Filed 2000·Granted Nov 30, 2004·17 cites·6 claims
- 0665US6781650B1Liquid crystal light valve and method for producing same, and liquid crystal projection display deviceIBM·Filed 2000·Granted Aug 24, 2004·10 cites·38 claims
- 0757US7525651B2Inspection apparatus and inspection method for pattern profile, and exposure apparatusIBM·Filed 2007·Granted Apr 28, 2009·1 cites·15 claims
- 0857US7310141B2Inspection device and inspection method for pattern profile, exposure systemIBM·Filed 2002·Granted Dec 18, 2007·5 cites·4 claims
- 0954US6614502B2Reflection type liquid crystal device, manufacturing method therefor, and projection display systemIBM·Filed 2001·Granted Sep 2, 2003·4 cites·3 claims
- 1053US6654129B1Film thickness testing apparatus and methodIBM·Filed 2000·Granted Nov 25, 2003·6 cites·17 claims
- 1150US6292246B1Reflection type liquid crystal device, manufacturing method therefor, and projection display systemIBM·Filed 1999·Granted Sep 18, 2001·15 cites·9 claims
- 1239US2002113959A1Method and apparatus for inspecting resist patternIBM·Filed 2001·Application pending·0 cites
- 1337US6040888APositioning of posts in liquid crystal valves for a projection display deviceIBM·Filed 1995·Granted Mar 21, 2000·10 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →