Inventor · disambiguated record
Lalitha Balasubramhanya
Also filed as: BALASUBRAMHANYA LALITHA · BALASUBRAMHANYA LALITHA S
5 granted patents·311 citations·filing 1999–2003
86Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
5 records- 0194US6521080B2Method and apparatus for monitoring a process by employing principal component analysisAPPLIED MATERIALS INC·Filed 2001·Granted Feb 18, 2003·76 cites·16 claims
- 0290US6413867B1Film thickness control using spectral interferometryAPPLIED MATERIALS INC·Filed 1999·Granted Jul 2, 2002·101 cites·17 claims
- 0389US6368975B1Method and apparatus for monitoring a process by employing principal component analysisAPPLIED MATERIALS INC·Filed 1999·Granted Apr 9, 2002·90 cites·14 claims
- 0482US6589869B2Film thickness control using spectral interferometryAPPLIED MATERIALS INC·Filed 2002·Granted Jul 8, 2003·26 cites·20 claims
- 0578US6896763B2Method and apparatus for monitoring a process by employing principal component analysisFiled 2003·Granted May 24, 2005·18 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →