Inventor · disambiguated record
Yi-Hsun Pan
Also filed as: PAN YI-HSUN
3 granted patents·3 citations·filing 2014–2020
56Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD3
Top patents by PatentIndex Score
3 records- 0175US9857680B2Cleaning module, cleaning apparatus and method of cleaning photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 2, 2018·3 cites·19 claims
- 0265US11237478B2Cleaning module, cleaning apparatus and method of cleaning photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Feb 1, 2022·0 cites·20 claims
- 0355US10747105B2Cleaning module, cleaning apparatus and method of cleaning photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Aug 18, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →