Inventor · disambiguated record
Raj Dhindsa
Also filed as: DHINDSA RAJ
7 granted patents·144 citations·filing 2003–2012
86Inventor score
Top patents by PatentIndex Score
7 records- 0194US7169256B2Plasma processor with electrode responsive to multiple RF frequenciesLAM RES CORP·Filed 2004·Granted Jan 30, 2007·60 cites·63 claims
- 0291US8674255B1Apparatus and method for controlling etch uniformityLENZ ERIC·Filed 2005·Granted Mar 18, 2014·23 cites·18 claims
- 0387US8216418B2Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-ringsPATRICK ROGER·Filed 2008·Granted Jul 10, 2012·13 cites·14 claims
- 0484US7405521B2Multiple frequency plasma processor method and apparatusLAM RES CORP·Filed 2003·Granted Jul 29, 2008·35 cites·45 claims
- 0581US8152954B2Showerhead electrode assemblies and plasma processing chambers incorporating the sameBETTENCOURT GREG·Filed 2007·Granted Apr 10, 2012·7 cites·22 claims
- 0680US8187413B2Electrode assembly and plasma processing chamber utilizing thermally conductive gasketPATRICK ROGER·Filed 2008·Granted May 29, 2012·5 cites·21 claims
- 0773US8268117B2Showerhead electrodesBETTENCOURT GREG·Filed 2012·Granted Sep 18, 2012·1 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →