Inventor · disambiguated record
Masahiro Nakaharada
Also filed as: NAKAHARADA MASAHIRO
10 granted patents·1 pending application·59 citations·filing 2006–2024
88Inventor score
Top patents by PatentIndex Score
11 records- 0190US7563042B2Substrate carrying apparatus, substrate carrying method, and coating and developing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jul 21, 2009·16 cites·13 claims
- 0289US9984904B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 29, 2018·5 cites·10 claims
- 0387US9460942B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Oct 4, 2016·7 cites·11 claims
- 0484US9984905B2Substrate treatment system, substrate transfer method and computer storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 29, 2018·3 cites·18 claims
- 0584US9287145B2Substrate treatment system, substrate transfer method, and a non-transitory computer storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Mar 15, 2016·7 cites·9 claims
- 0681US10359320B2Method of measuring a temperature of a heat plate and method thereofTOKYO ELECTRON LTD·Filed 2017·Granted Jul 23, 2019·3 cites·6 claims
- 0779US8985929B2Substrate processing apparatus, substrate processing method and storage mediumENOKIDA SUGURU·Filed 2012·Granted Mar 24, 2015·7 cites·7 claims
- 0875US7284917B2Coating and developing system and coating and developing methodTOKYO ELECTRON LTD·Filed 2006·Granted Oct 23, 2007·5 cites·21 claims
- 0971US8441618B2Substrate transfer method and apparatusNAKAHARADA MASAHIRO·Filed 2010·Granted May 14, 2013·4 cites·8 claims
- 1068US9082800B2Substrate treatment system, substrate transfer method and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Jul 14, 2015·2 cites·20 claims
- 1161US2025210391A1Substrate processing system and substrate processing methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →