Inventor · disambiguated record
Tamotsu Maruyama
Also filed as: MARUYAMA TAMOTSU
13 granted patents·137 citations·filing 1995–2006
91Inventor score
Top patents by PatentIndex Score
13 records- 0195US7771893B2Photomask blank, photomask and fabrication method thereofSHINETSU CHEMICAL CO·Filed 2006·Granted Aug 10, 2010·28 cites·20 claims
- 0277US6511778B2Phase shift mask blank, phase shift mask and method of manufactureSHINETSU CHEMICAL CO·Filed 2001·Granted Jan 28, 2003·15 cites·20 claims
- 0373US7622227B2Phase-shift photomask-blank, phase-shift photomask and fabrication method thereofSHINETSU CHEMICAL CO·Filed 2006·Granted Nov 24, 2009·3 cites·20 claims
- 0470US5751055ASemiconductor single crystalline substrate and method for production thereofSHINETSU HANDOTAI KK·Filed 1995·Granted May 12, 1998·34 cites·3 claims
- 0567US6503669B2Photomask blank, photomask and method of manufactureSHINETSU CHEMICAL CO·Filed 2001·Granted Jan 7, 2003·8 cites·6 claims
- 0659US6514642B2Phase shift mask and method of manufactureSHINETSU CHEMICAL CO·Filed 2001·Granted Feb 4, 2003·5 cites·20 claims
- 0758US6641958B2Phase shift mask blank, phase shift mask, and methods of manufactureSHINETSU CHEMICAL CO·Filed 2001·Granted Nov 4, 2003·6 cites·16 claims
- 0857US6503668B2Phase shift mask blank, phase shift mask, and method of manufactureSHINETSU CHEMICAL CO·Filed 2001·Granted Jan 7, 2003·4 cites·11 claims
- 0956US5882401AMethod for manufacturing silicon single crystal substrate for use of epitaxial layer growthSHINETSU HANDOTAI KK·Filed 1997·Granted Mar 16, 1999·21 cites·14 claims
- 1049US6733930B2Photomask blank, photomask and method of manufactureSHINETSU CHEMICAL CO·Filed 2002·Granted May 11, 2004·2 cites·15 claims
- 1147US6352801B1Phase shift mask and making processSHINETSU CHEMICAL CO·Filed 2000·Granted Mar 5, 2002·1 cites·13 claims
- 1245US6727027B2Photomask blank and photomaskSHINETSU CHEMICAL CO·Filed 2001·Granted Apr 27, 2004·1 cites·15 claims
- 1343US5989985ASemiconductor single crystalline substrate and method for production thereofSHINETSU HANDOTAI KK·Filed 1997·Granted Nov 23, 1999·9 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →