Inventor · disambiguated record
Marc Shull
Also filed as: SHULL MARC · SHULL MARC DAVID
5 granted patents·7 pending applications·202 citations·filing 2000–2025
75Inventor score
Top patents by PatentIndex Score
12 records- 0195US6506254B1Semiconductor processing equipment having improved particle performanceLAM RES CORP·Filed 2000·Granted Jan 14, 2003·199 cites·11 claims
- 0290US11776793B2Plasma source with ceramic electrode plateAPPLIED MATERIALS INC·Filed 2020·Granted Oct 3, 2023·2 cites·20 claims
- 0387US12091749B2Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outletAPPLIED MATERIALS INC·Filed 2021·Granted Sep 17, 2024·1 cites·18 claims
- 0477US2025246461A1Multi-zone lamp heating and temperature monitoring in epitaxy process chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0573US2024376595A1Microstructure control of conducting materials through surface coating of powdersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0668US2022367216A1Multi-zone lamp heating and temperature monitoring in epitaxy process chamberAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 0765US11111582B2Porous showerhead for a processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Sep 7, 2021·0 cites·20 claims
- 0862US12084763B2Microstructure control of conducting materials through surface coating of powdersAPPLIED MATERIALS INC·Filed 2021·Granted Sep 10, 2024·0 cites·11 claims
- 0960US2024247379A1Formation of metallic films on electroless metal plating of surfacesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1059US2025372407A1Ultrasonic bonding for process chamber componentsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1156US2025336711A1Substrate holder systemsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1255US2025334445A1Substrate measurement systems having substrate holdersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →