Inventor · disambiguated record
Tsukasa Yashima
Also filed as: YASHIMA TSUKASA
2 granted patents·5 pending applications·2 citations·filing 2007–2024
37Inventor score
Top patents by PatentIndex Score
7 records- 0164US10998210B2Substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2018·Granted May 4, 2021·1 cites·10 claims
- 0258US2025232993A1Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording MediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0348US2023106341A1Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0445US2023369085A1Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0534US8806370B2Substrate processing apparatusNOGAMI SHIGEKI·Filed 2007·Granted Aug 12, 2014·1 cites·8 claims
- 0633US2009114346A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2008·Application pending·0 cites
- 0731US2009020408A1Substrate Processing Method and Substrate Processing ApparatusHITACHI INT ELECTRIC INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →