Inventor · disambiguated record
Hidetaka Nakao
Also filed as: NAKAO HIDETAKA
10 granted patents·1 pending application·135 citations·filing 1997–2017
89Inventor score
Top patents by PatentIndex Score
11 records- 0188US5885134APolishing apparatusEBARA CORP·Filed 1997·Granted Mar 23, 1999·81 cites·20 claims
- 0287US8388409B2Substrate polishing apparatusNAKAO HIDETAKA·Filed 2010·Granted Mar 5, 2013·9 cites·8 claims
- 0385US9555517B2Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing methodEBARA CORP·Filed 2015·Granted Jan 31, 2017·4 cites·24 claims
- 0482US9144881B2Polishing apparatus and polishing methodEBARA CORP·Filed 2014·Granted Sep 29, 2015·5 cites·9 claims
- 0577US8038136B2Hand having rocking mechanism and substrate delivering device having the sameYASKAWA DENKI SEISAKUSHO KK·Filed 2009·Granted Oct 18, 2011·6 cites·7 claims
- 0676US10688622B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·19 claims
- 0763US6074276APolishing apparatusEBARA CORP·Filed 1998·Granted Jun 13, 2000·22 cites·5 claims
- 0860US8206197B2Polishing apparatus and program thereofNAKAO HIDETAKA·Filed 2008·Granted Jun 26, 2012·1 cites·33 claims
- 0956USRE38215EPolishing apparatusEBARA CORP·Filed 2001·Granted Aug 12, 2003·4 cites·30 claims
- 1053US8078306B2Polishing apparatus and polishing methodNAKAO HIDETAKA·Filed 2008·Granted Dec 13, 2011·1 cites·9 claims
- 1138US2005142991A1Substrate polishing apparatusFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →