Inventor · disambiguated record
Rodney D. Simmons
Also filed as: SIMMONS RODNEY D
8 granted patents·2 pending applications·373 citations·filing 2001–2022
90Inventor score
Top patents by PatentIndex Score
10 records- 0197US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 0297US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 0396US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 0485US7453077B2EUV light sourceCYMER INC·Filed 2005·Granted Nov 18, 2008·20 cites·26 claims
- 0582USD471720SCamouflage fabricFiled 2001·Granted Mar 18, 2003·30 cites·1 claims
- 0677US8061923B2Blind motorized coupling arrangements for coupling UV light source subsystem and scanner subsystem in a UV lithography system and methods thereforSIMMONS RODNEY D·Filed 2008·Granted Nov 22, 2011·12 cites·13 claims
- 0775US7291853B2Discharge produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Nov 6, 2007·9 cites·6 claims
- 0865US7402825B2LPP EUV drive laser input systemCYMER INC·Filed 2005·Granted Jul 22, 2008·6 cites·71 claims
- 0956US2024361222A1Droplet detection metrology utilizing metrology beam scatteringASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1043US2010176313A1Extreme ultraviolet light sourceCYMER INC·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →