Inventor · disambiguated record
Laurent Dieu
Also filed as: DIEU LAURENT
4 granted patents·6 pending applications·27 citations·filing 2002–2006
72Inventor score
Top patents by PatentIndex Score
10 records- 0170US7101645B1Reflective mask for short wavelength lithographyDUPONT PHOTOMASKS INC·Filed 2003·Granted Sep 5, 2006·12 cites·18 claims
- 0267US6844119B2Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift maskHOYA CORP·Filed 2002·Granted Jan 18, 2005·9 cites·4 claims
- 0362US6756161B2Ion-beam deposition process for manufacture of binary photomask blanksDU PONT·Filed 2002·Granted Jun 29, 2004·6 cites·5 claims
- 0438US7056623B2Photomask and method for manufacturing the sameTOPPAN PHOTOMASKS INC·Filed 2003·Granted Jun 6, 2006·0 cites·23 claims
- 0533US2004115343A1Ion-beam deposition process for manufacturing multi-layered attenuated phase shift photomask blanksFiled 2002·Application pending·0 cites
- 0633US2004106049A1Ion-beam deposition process for manufacturing binary photomask blanksFiled 2002·Application pending·0 cites
- 0733US2002197509A1Ion-beam deposition process for manufacturing multi-layered attenuated phase shift photomask blanksFiled 2002·Application pending·0 cites
- 0832US2003228529A1Photomask and method for repairing defectsDUPONT PHOTOMASKS INC·Filed 2003·Application pending·0 cites
- 0930US2006134534A1Photomask and method for maintaining optical properties of the sameDIEU LAURENT·Filed 2006·Application pending·0 cites
- 1024US2005208393A1Photomask and method for creating a protective layer on the sameDIEU LAURENT·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →