Inventor · disambiguated record
Tadami Tanaka
Also filed as: TANAKA TADAMI
8 granted patents·92 citations·filing 1998–2004
87Inventor score
Top patents by PatentIndex Score
8 records- 0184US6569237B2Method of pulling up silicon single crystal and method of manufacturing epitaxial waferSUMITOMO MITSUBISHI SILICON·Filed 2001·Granted May 27, 2003·22 cites·12 claims
- 0271US6709957B2Method of producing epitaxial wafersSUMITOMO MITSUBISHI SILICON·Filed 2002·Granted Mar 23, 2004·9 cites·10 claims
- 0369US6835245B2Method of manufacturing epitaxial wafer and method of producing single crystal as material thereforSUMITOMO MITSUBISHI SILICON·Filed 2001·Granted Dec 28, 2004·8 cites·5 claims
- 0468US6905771B2Silicon waferSUMITOMO MITSUBISHI SILICON·Filed 2003·Granted Jun 14, 2005·12 cites·14 claims
- 0567US6514335B1High-quality silicon single crystal and method of producing the sameSUMITOMO METAL IND·Filed 1998·Granted Feb 4, 2003·21 cites·11 claims
- 0663US7014704B2Method for growing silicon single crystalSUMITOMO MITSUBISHI SILICON·Filed 2003·Granted Mar 21, 2006·5 cites·3 claims
- 0758US6113687AMethod for making a silicon single crystal waferSUMITOMO METAL IND·Filed 1998·Granted Sep 5, 2000·14 cites·12 claims
- 0846US7704318B2Silicon wafer, SOI substrate, method for growing silicon single crystal, method for manufacturing silicon wafer, and method for manufacturing SOI substrateSUMCO CORP·Filed 2004·Granted Apr 27, 2010·1 cites·2 claims
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