Inventor · disambiguated record
Norifumi Tokuda
Also filed as: TOKUDA NORIFUMI
6 granted patents·2 pending applications·27 citations·filing 2003–2009
77Inventor score
Top patents by PatentIndex Score
8 records- 0187US7635892B2Semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2006·Granted Dec 22, 2009·13 cites·10 claims
- 0258US7009239B2Vertical semiconductor device and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 2004·Granted Mar 7, 2006·9 cites·6 claims
- 0357US8696816B2Semiconductor manufacturing apparatusTOKUDA NORIFUMI·Filed 2005·Granted Apr 15, 2014·4 cites·3 claims
- 0451US2010038707A1Semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2009·Application pending·0 cites
- 0549US7629226B2Semiconductor device and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 2008·Granted Dec 8, 2009·0 cites·1 claims
- 0641US7504707B2Semiconductor device and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 2003·Granted Mar 17, 2009·1 cites·3 claims
- 0737US2005156283A1Semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2003·Application pending·0 cites
- 0836US7994067B2Semiconductor manufacturing equipment with an open-topped cassette apparatusMITSUBISHI ELECTRIC CORP·Filed 2004·Granted Aug 9, 2011·0 cites·4 claims
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