Inventor · disambiguated record
Yasuo Yatsugake
Also filed as: YATSUGAKE YASUO
9 granted patents·2 pending applications·317 citations·filing 1982–2014
89Inventor score
Files withHITACHI LTD4HITACHI HIGH TECH CORP2AITOS INC1HITACHI ELECTR ENG1HITACHI HIGH TECH ELECT ENG CO1
Top patents by PatentIndex Score
11 records- 0192US5903342AInspection method and device of wafer surfaceHITACHI ELECTR ENG·Filed 1996·Granted May 11, 1999·218 cites·16 claims
- 0291US6894302B2Surface inspection apparatus and method thereofHITACHI HIGH TECH ELECT ENG CO·Filed 2001·Granted May 17, 2005·35 cites·7 claims
- 0389US7242016B2Surface inspection apparatus and method thereofHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 10, 2007·11 cites·15 claims
- 0488US7417244B2Surface inspection apparatus and method thereofHITACHI LTD·Filed 2007·Granted Aug 26, 2008·9 cites·18 claims
- 0584US7952085B2Surface inspection apparatus and method thereofHITACHI LTD·Filed 2008·Granted May 31, 2011·6 cites·17 claims
- 0672US4685802ASmall particle detection systemHITACHI LTD·Filed 1985·Granted Aug 11, 1987·32 cites·8 claims
- 0764US9551670B2Surface inspection apparatus and method thereofHITACHI HIGH TECH CORP·Filed 2014·Granted Jan 24, 2017·0 cites·11 claims
- 0855US8729514B2Surface inspection apparatus and method thereofISHIMARU ICHIRO·Filed 2011·Granted May 20, 2014·0 cites·19 claims
- 0944US2007268483A1Inspection apparatus for image pickup device, optical inspection unit device, and optical inspection unitAITOS INC·Filed 2006·Application pending·0 cites
- 1038US2007076942A1Semiconductor device manufacturing systemYATSUGAKE YASUO·Filed 2004·Application pending·0 cites
- 1137US4464011ALight beam scanning apparatus and the methodHITACHI LTD·Filed 1982·Granted Aug 7, 1984·6 cites·8 claims
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