Inventor · disambiguated record
Thomas D. Steiger
Also filed as: STEIGER THOMAS D · STEIGER THOMAS DICKSON
18 granted patents·2 pending applications·134 citations·filing 1988–2025
93Inventor score
Top patents by PatentIndex Score
20 records- 0189US7006547B2Very high repetition rate narrow band gas discharge laser systemCYMER INC·Filed 2004·Granted Feb 28, 2006·27 cites·60 claims
- 0286US6882674B2Four KHz gas discharge laser systemCYMER INC·Filed 2001·Granted Apr 19, 2005·31 cites·66 claims
- 0384US7369596B2Chamber for a high energy excimer laser sourceCYMER INC·Filed 2006·Granted May 6, 2008·8 cites·14 claims
- 0483US7535948B2Cathodes for fluorine gas discharge lasersCYMER INC·Filed 2006·Granted May 19, 2009·7 cites·26 claims
- 0582US7542502B2Thermal-expansion tolerant, preionizer electrode for a gas discharge laserCYMER INC·Filed 2005·Granted Jun 2, 2009·7 cites·19 claims
- 0678US6690706B2High rep-rate laser with improved electrodesCYMER INC·Filed 2002·Granted Feb 10, 2004·17 cites·30 claims
- 0776US2025286337A1Conduit system, radiation source, lithographic apparatus, and methods thereofCymer LLC·Filed 2025·Application pending·0 cites
- 0873US8855166B26 KHz and above gas discharge laser systemUJAZDOWSKI RICHARD C·Filed 2012·Granted Oct 7, 2014·3 cites·19 claims
- 0968US7633989B2High pulse repetition rate gas discharge laserCYMER INC·Filed 2005·Granted Dec 15, 2009·2 cites·9 claims
- 1068US7522650B2Gas discharge laser chamber improvementsCYMER INC·Filed 2004·Granted Apr 21, 2009·8 cites·64 claims
- 1167US6937635B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Aug 30, 2005·7 cites·16 claims
- 1265US12341314B2Conduit system, radiation source, lithographic apparatus, and methods thereofCymer LLC·Filed 2021·Granted Jun 24, 2025·0 cites·20 claims
- 1365US12125695B2Reducing fretting corrosion in a gas discharge chamber support deviceCymer LLC·Filed 2021·Granted Oct 22, 2024·0 cites·33 claims
- 1459US7301980B2Halogen gas discharge laser electrodesCYMER INC·Filed 2004·Granted Nov 27, 2007·5 cites·82 claims
- 1555US7132123B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Nov 7, 2006·3 cites·5 claims
- 1653US8814522B2Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laserAMADA YOSHIHO·Filed 2007·Granted Aug 26, 2014·1 cites·29 claims
- 1749US9620920B2High pulse repetition rate gas discharge laserGILLESPIE WALTER D·Filed 2009·Granted Apr 11, 2017·0 cites·7 claims
- 1849US7230965B2Anodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Jun 12, 2007·1 cites·28 claims
- 1946US2006222034A16 Khz and above gas discharge laser systemCYMER INC·Filed 2005·Application pending·0 cites
- 2042US4894208ASystem for separating radioactive NA from AlUNIV MICHIGAN·Filed 1988·Granted Jan 16, 1990·7 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →