Inventor · disambiguated record
Hideki Kiryu
Also filed as: KIRYU HIDEKI
3 granted patents·1 pending application·136 citations·filing 2000–2001
75Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
4 records- 0193US6467491B1Processing apparatus and processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Oct 22, 2002·97 cites·7 claims
- 0275US6866890B2Method of forming a dielectric filmTOKYO ELECTRON LTD·Filed 2001·Granted Mar 15, 2005·18 cites·30 claims
- 0375US6617207B1Method and system for forming a stacked gate insulating filmTOKYO ELECTRON LTD·Filed 2000·Granted Sep 9, 2003·21 cites·14 claims
- 0435US2004053472A1Method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster toolFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →