Inventor · disambiguated record
Wilhelmus Maria Corbeij
Also filed as: CORBEIJ WILHELMUS M · CORBEIJ WILHELMUS MARIA
6 granted patents·1 pending application·101 citations·filing 1999–2010
83Inventor score
Technology areasG03F
Top patents by PatentIndex Score
7 records- 0197US7791724B2Characterization of transmission losses in an optical systemASML NETHERLANDS BV·Filed 2006·Granted Sep 7, 2010·59 cites·21 claims
- 0289US7480050B2Lithographic system, sensor, and method of measuring properties of a substrateASML NETHERLANDS BV·Filed 2006·Granted Jan 20, 2009·13 cites·22 claims
- 0389US7403293B2Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing methodASML NETHERLANDS·Filed 2006·Granted Jul 22, 2008·15 cites·32 claims
- 0484US8482718B2Lithographic apparatus and device manufacturing methodCORBEIJ WILHELMUS MARIA·Filed 2010·Granted Jul 9, 2013·5 cites·16 claims
- 0550US8497976B2Substrate measurement method and apparatusCORBEIJ WILHELMUS MARIA·Filed 2009·Granted Jul 30, 2013·0 cites·9 claims
- 0648US2007002336A1Metrology apparatus, lithographic apparatus, process apparatus, metrology method and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 0740US6348303B1Lithographic projection apparatusASM LITHOGRAPHY BV·Filed 1999·Granted Feb 19, 2002·9 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →