Inventor · disambiguated record
Robert D. Dible
Also filed as: DIBLE ROBERT D · DIBLE ROBERT DUANE
7 granted patents·760 citations·filing 1995–2001
90Inventor score
Files withLAM RES CORP7
Top patents by PatentIndex Score
7 records- 0196US6239403B1Power segmented electrodeLAM RES CORP·Filed 2000·Granted May 29, 2001·102 cites·21 claims
- 0296US5534751APlasma etching apparatus utilizing plasma confinementLAM RES CORP·Filed 1995·Granted Jul 9, 1996·290 cites·30 claims
- 0394US6042686APower segmented electrodeLAM RES CORP·Filed 1995·Granted Mar 28, 2000·117 cites·18 claims
- 0494US5573595AMethods and apparatus for generating plasmaLAM RES CORP·Filed 1995·Granted Nov 12, 1996·126 cites·23 claims
- 0587US5824606AMethods and apparatuses for controlling phase difference in plasma processing systemsLAM RES CORP·Filed 1996·Granted Oct 20, 1998·75 cites·16 claims
- 0685US6411490B2Integrated power modules for plasma processing systemsLAM RES CORP·Filed 2001·Granted Jun 25, 2002·30 cites·18 claims
- 0759US6222718B1Integrated power modules for plasma processing systemsLAM RES CORP·Filed 1998·Granted Apr 24, 2001·20 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →