Inventor · disambiguated record
Shunichi Aiyoshizawa
Also filed as: AIYOSHIZAWA SHUNICHI
11 granted patents·6 pending applications·377 citations·filing 1990–2013
93Inventor score
Top patents by PatentIndex Score
17 records- 0193US7837534B2Apparatus for heating or cooling a polishing surface of a polishing apparatusEBARA CORP·Filed 2008·Granted Nov 23, 2010·26 cites·8 claims
- 0293US5142173ABearing structureEBARA CORP·Filed 1990·Granted Aug 25, 1992·73 cites·10 claims
- 0388US8491277B2Submersible motor pump, motor pump, and tandem mechanical sealKAWABATA JUNYA·Filed 2010·Granted Jul 23, 2013·20 cites·13 claims
- 0487US5223758ASpindle motorEBARA CORP·Filed 1991·Granted Jun 29, 1993·50 cites·9 claims
- 0584US4998033AGas dynamic bearing for spindle motorEBARA CORP·Filed 1990·Granted Mar 5, 1991·63 cites·28 claims
- 0682US5089732ASpindle motorEBARA CORP·Filed 1990·Granted Feb 18, 1992·43 cites·13 claims
- 0780US5357162ASpindle motor using dynamic pressure bearingsEBARA CORP·Filed 1993·Granted Oct 18, 1994·38 cites·8 claims
- 0875US5471104ADrum motor for VCREBARA CORP·Filed 1993·Granted Nov 28, 1995·29 cites·14 claims
- 0974US6519273B2Magnetic bearing and circulation fan apparatusEBARA CORP·Filed 2001·Granted Feb 11, 2003·13 cites·6 claims
- 1063US6881268B2Method and apparatus for forming required gas atmosphereEBARA CORP·Filed 2000·Granted Apr 19, 2005·11 cites·17 claims
- 1158US2008220621A1Substrate treatment apparatus and substrate treatment methodTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1251US2007092651A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 1351US2007092646A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 1451US2013285330A1Submersible motor pump, motor pump, and tandem mechanical sealEBARA CORP·Filed 2013·Application pending·0 cites
- 1551US2007095791A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 1649US2006169208A1Substrate processing apparatus and substrate processing methodBEAM CORP E·Filed 2006·Application pending·0 cites
- 1742US5322369ADynamic pressure bearingEBARA CORP·Filed 1993·Granted Jun 21, 1994·11 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →