Inventor · disambiguated record
Masaru Amai
Also filed as: AMAI MASARU
7 granted patents·1 pending application·30 citations·filing 2002–2021
82Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0184US10381233B2Method and apparatus for substrate processingTOKYO ELECTRON LTD·Filed 2017·Granted Aug 13, 2019·5 cites·11 claims
- 0275US7803230B2Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the methodTOKYO ELECTRON LTD·Filed 2005·Granted Sep 28, 2010·5 cites·10 claims
- 0373US7472713B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jan 6, 2009·4 cites·3 claims
- 0468US7063094B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Jun 20, 2006·11 cites·12 claims
- 0562US7329616B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Feb 12, 2008·1 cites·10 claims
- 0655US7416632B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Aug 26, 2008·4 cites·6 claims
- 0748US11935766B2Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 19, 2024·0 cites·9 claims
- 0847US2023264233A1Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →