Inventor · disambiguated record
Shew-Tsu Hsu
Also filed as: HSU SHEW-TSU
2 granted patents·23 citations·filing 2001–2002
60Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0165US6583062B1Method of improving an aspect ratio while avoiding etch stopTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jun 24, 2003·12 cites·20 claims
- 0263US6830877B2Method for forming via and contact holes with deep UV photoresistTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Dec 14, 2004·11 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →