Inventor · disambiguated record
Yukie Minekawa
Also filed as: MINEKAWA YUKIE
2 granted patents·6 citations·filing 2013–2017
48Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0180US10734251B2Liquid processing apparatus, liquid processing method, and storage medium for liquid processTOKYO ELECTRON LTD·Filed 2013·Granted Aug 4, 2020·5 cites·8 claims
- 0265US10274843B2Exposure apparatus, exposure method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Apr 30, 2019·1 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →