Inventor · disambiguated record
Mark J. Dalberth
Also filed as: DALBERTH MARK J
3 granted patents·2 pending applications·36 citations·filing 2001–2015
68Inventor score
Top patents by PatentIndex Score
5 records- 0187US9567670B2Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter rangeULTRATECH INC·Filed 2014·Granted Feb 14, 2017·3 cites·13 claims
- 0285US6679946B1Method and apparatus for controlling substrate temperature and layer thickness during film formationOPTICAL COMM PRODUCTS INC·Filed 2001·Granted Jan 20, 2004·32 cites·31 claims
- 0378US9783888B2Atomic layer deposition headULTRATECH INC·Filed 2015·Granted Oct 10, 2017·1 cites·15 claims
- 0460US2012141676A1Ald coating systemSERSHEN MICHAEL J·Filed 2011·Application pending·0 cites
- 0541US2011311726A1Method and apparatus for precursor deliveryLIU GUO·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Mark J. Dalberth files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →