Inventor · disambiguated record
Eitan Hajaj
Also filed as: HAJAJ EITAN
11 granted patents·2 pending applications·18 citations·filing 2016–2024
84Inventor score
Top patents by PatentIndex Score
13 records- 0196US11796925B2Scanning overlay metrology using overlay targets having multiple spatial frequenciesKLA CORP·Filed 2022·Granted Oct 24, 2023·6 cites·22 claims
- 0292US11862524B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jan 2, 2024·2 cites·20 claims
- 0389US11726410B2Multi-resolution overlay metrology targetsKLA CORP·Filed 2021·Granted Aug 15, 2023·2 cites·22 claims
- 0487US12111580B2Optical metrology utilizing short-wave infrared wavelengthsKLA CORP·Filed 2021·Granted Oct 8, 2024·2 cites·38 claims
- 0586US10837919B2Single cell scatterometry overlay targetsKLA TENCOR CORP·Filed 2018·Granted Nov 17, 2020·3 cites·20 claims
- 0681US10579768B2Process compatibility improvement by fill factor modulationKLA TENCOR CORP·Filed 2016·Granted Mar 3, 2020·3 cites·5 claims
- 0780US12055859B2Overlay mark design for electron beam overlayKLA CORP·Filed 2023·Granted Aug 6, 2024·0 cites·15 claims
- 0870US11703767B2Overlay mark design for electron beam overlayKLA CORP·Filed 2021·Granted Jul 18, 2023·0 cites·10 claims
- 0960US2025272812A1Side-by-side off-center die overlay targetKLA CORP·Filed 2024·Application pending·0 cites
- 1058US12105414B2Targets for diffraction-based overlay error metrologyKLA CORP·Filed 2022·Granted Oct 1, 2024·0 cites·16 claims
- 1157US2024068804A1Multi-pitch grid overlay target for scanning overlay metrologyKLA CORP·Filed 2023·Application pending·0 cites
- 1256US11720031B2Overlay design for electron beam and scatterometry overlay measurementsKLA CORP·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
- 1353US11676909B2Metrology targets for high topography semiconductor stacksKLA CORP·Filed 2020·Granted Jun 13, 2023·0 cites·20 claims
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