Inventor · disambiguated record
Masashi Itonaga
Also filed as: ITONAGA MASASHI
3 granted patents·3 pending applications·6 citations·filing 2013–2019
56Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0181US10141209B2Processing gas generating apparatus, processing gas generating method, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Nov 27, 2018·5 cites·14 claims
- 0260US11049758B2Substrate placing apparatus and substrate placing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 29, 2021·1 cites·12 claims
- 0343US10340140B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 2, 2019·0 cites·13 claims
- 0436US2014041805A1Substrate processing apparatus and gas supply apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0536US2014083614A1Substrate processing apparatus and gas supply apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0631US2019295864A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →